SPUTTERING APPARATUS WITH A MAGNET ARRAY HAVING A GEOMETRY FOR A SPECIFIED TARGET EROSION PROFILE - Patent 0585445

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EP 0 585 445 A1

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(43)	Date of publication:
	09.03.1994 Bulletin 1994/10

(21)	Application number: 93907615.0

(22)	Date of filing: 19.03.1993

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International Patent Classification (IPC):

C23C 14/ 35^{( . )}
H01L 21/ 203^{( . )}

H01J 37/ 34^{( . )}
H01L 21/ 285^{( . )}

(86)	International application number:
	PCT/US1993/002581

(87)	International publication number:
	WO 1993/019221 (30.09.1993 Gazette 1993/24)

(84)	Designated Contracting States:
	DE ES FR GB IE IT NL SE

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Priority:

20.03.1992 US 19920855988

(60)	Divisional application:
	01122853.3 /

(71)	Applicant: VARIAN ASSOCIATES, INC.
	Palo Alto, California 94304 (US)

(72)	Inventor:
	HARRA, David J. San Francisco, CA 94123 (US)

(74)	Representative: Cline, Roger Ledlie
	EDWARD EVANS & CO. Chancery House 53-64 Chancery Lane London WC2A 1SD London WC2A 1SD (GB)

(54)	SPUTTERING APPARATUS WITH A MAGNET ARRAY HAVING A GEOMETRY FOR A SPECIFIED TARGET EROSION PROFILE