(19)

(11)

EP 0 586 651 A1

(12)

(43) Date of publication: 16.03.1994 Bulletin 1994/11 (21) Application number: 93905518.0 (22) Date of filing: 05.03.1993

(51) International Patent Classification (IPC):  C23C 16/ 44( . ) H01L 21/ 00( . ) C23C 16/ 455( . ) (86) International application number: PCT/GB1993/000461 (87) International publication number: WO 1993/019222 (30.09.1993 Gazette 1993/24)

(84) Designated Contracting States: AT BE CH DE DK ES FR GB GR IE IT LI LU MC NL PT SE (30) Priority: 25.03.1992 GB 19920006442 (71) Applicant: METALS RESEARCH SEMICONDUCTORS LTD. Newton, Cambridge CB2 5PE (GB)	(72) Inventor: TURNER, Brian Cambridge, Cambridgeshire CB3 8SP (GB) (74) Representative: Nash, Keith Wilfrid  Pearl Assurance House 90-92 Regent Street Cambridge CB2 1DP Cambridge CB2 1DP (GB)