(19)

(11)

EP 0 588 451 A3

(12)	EUROPEAN PATENT APPLICATION

(88) Date of publication A3: 18.05.1994 Bulletin 1994/20 (43) Date of publication A2: 23.03.1994 Bulletin 1994/12 (21) Application number: 93203439.0 (22) Date of filing: 08.07.1988

(51) International Patent Classification (IPC)5: B03C 1/02, H01L 39/24

(84) Designated Contracting States: CH DE FR GB LI NL (30) Priority: 09.12.1987 JP 309473/87 29.03.1988 JP 73363/88 06.04.1988 JP 83025/88 06.04.1988 JP 83026/88 (62) Application number of the earlier application in accordance with Art. 76 EPC: 88306287.9 / 0320083 (71) Applicant: CANON KABUSHIKI KAISHA Tokyo (JP)

(72) Inventors: Kishi, Fumio,c/o Canon K.K. Ohta-ku, Tokyo (JP) Akaike, Masatake Atsugi-shi, Kanagawa-ken (JP) Yamamoto, Keisuke Atsugi-shi, Kanagawa-ken (JP) Motoi, Taiko,c/o Canon K.K. Ohta-ku, Tokyo (JP) Kaneko, Norio Atsugi-shi, Kanagawa-ken (JP) Iwatate, Fuji Setagaya-ku, Tokyo (JP) Ohmi, Kazuaki Yokohama-shi, Kanagawa-ken (JP) Kawasaki, Takehiko Atsugi-shi, Kanagawa-ken (JP) Shinjou, Atsuko Isehara-shi, Kanagawa-ken (JP) (74) Representative: Beresford, Keith Denis Lewis et al BERESFORD & Co. 2-5 Warwick Court High Holborn London WC1R 5DJ London WC1R 5DJ (GB) (56) References cited: :

Remarks: This application was filed on 08 - 12 - 1993 as a divisional application to the application mentioned under INID code 60.