METHOD OF DEPOSITING OPTICAL OXIDE COATINGS AT ENHANCED RATES - Patent 0594568

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EP 0 594 568 A1

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(43)	Date of publication:
	04.05.1994 Bulletin 1994/18

(21)	Application number: 90912513.0

(22)	Date of filing: 06.08.1990

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International Patent Classification (IPC):

C23C 14/ 00^{( . )}
C23C 14/ 34^{( . )}

C23C 14/ 08^{( . )}

(86)	International application number:
	PCT/US1990/004382

(87)	International publication number:
	WO 1991/002103 (21.02.1991 Gazette 1991/05)

(84)	Designated Contracting States:
	AT BE CH DE ES FR GB LI NL SE

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Priority:

07.08.1989 US 19890390589

(71)	Applicant: THE BOC GROUP, INC.
	Murray Hill, New Providence, New Jersey 07974 (US)

(72)	Inventors:
	NADEL, Steven, J. Berkeley, CA 94703 (US) VAN SKIKE, Tamzen, L. Concord, CA 94520 (US) WOLFE, Jesse, D. San Ramon, CA 94583 (US) WAMBOLDT, Leonard, G. Davis, CA 95616 (US)

(74)	Representative: Bousfield, Roger James, et al
	The BOC Group plc Chertsey Road Windlesham Surrey GU20 6HJ Windlesham Surrey GU20 6HJ (GB)

(54)	METHOD OF DEPOSITING OPTICAL OXIDE COATINGS AT ENHANCED RATES