CONTINUOUS VACUUM ARC BROAD BEAM ION SOURCE - Patent 0596924

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EP 0 596 924 A1

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(43)	Date of publication:
	18.05.1994 Bulletin 1994/20

(21)	Application number: 92915546.0

(22)	Date of filing: 25.06.1992

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International Patent Classification (IPC):

C23C 14/ 32^{( . )}
H01J 27/ 08^{( . )}
H01J 37/ 08^{( . )}

C23C 14/ 48^{( . )}
H01J 27/ 14^{( . )}
H01J 37/ 317^{( . )}

(86)	International application number:
	PCT/US1992/005399

(87)	International publication number:
	WO 1993/001327 (21.01.1993 Gazette 1993/03)

(84)	Designated Contracting States:
	AT BE CH DE DK ES FR GB GR IT LI LU MC NL SE

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Priority:

11.07.1991 US 19910728566
23.04.1992 US 19920872971

(71)	Applicant: THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
	Oakland, California 94612-3550 (US)

(72)	Inventors:
	BROWN, Ian, G. Berkeley, CA 94708 (US) MacGILL, Robert, A. Richmond, CA 95805 (US) GALVIN, James, E. Emeryville, CA 94608 (US) DICKINSON, Michael, R. Alameda, CA 94501 (US)

(74)	Representative: Linn, Samuel Jonathan
	MEWBURN ELLIS York House 23 Kingsway London WC2B 6HP London WC2B 6HP (GB)

(54)	CONTINUOUS VACUUM ARC BROAD BEAM ION SOURCE