(19)
(11) EP 0 604 415 A1

(12)

(43) Date of publication:
06.07.1994 Bulletin 1994/27

(21) Application number: 91916107.0

(22) Date of filing: 17.09.1991
(51) International Patent Classification (IPC): 
G01N 23/ 225( . )
G01T 1/ 24( . )
 G01N 23/ 227( . )
G01T 1/ 28( . )
(86) International application number:
PCT/EP1991/001771
(87) International publication number:
WO 1993/006470 (01.04.1993 Gazette 1993/09)
(84) Designated Contracting States:
AT BE CH DE DK ES FR GB GR IT LI LU NL SE

(71) Applicant: EUROPEAN ECONOMIC COMMUNITY E.E.C.
L-2920 Luxembourg (LU)

(72) Inventors:
  • GOULON, José
    F-54520 Laxou (FR)
  • GAUTHIER, Christophe
    F-38000 Grenoble (FR)
  • LECLERC, Louis
    F-54230 Chaligny (FR)
  • RETOURNARD, Alain
    F-88270 Dompaire (FR)
  • CORTES, Robert
    F-94320 Thiais (FR)
  • LAMPERT, Marie, Odile
    F-67380 Lingolsheim (FR)
  • HENCK, Roland
    F-67170 Olwisheim (FR)

(74) Representative: Weinmiller, Jürgen 
Lennéstrasse 9 Postfach 24
D-82336 Feldafing
D-82336 Feldafing (DE)

   


(54) ELECTRON DETECTOR DEVICE FOR SPECTROSCOPIC ANALYSES OF SURFACES UNDER X-RAY EXCITATION