LOW DIELECTRIC CONSTANT SUBSTRATE AND METHOD OF MAKING - Patent 0605421

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(11)

EP 0 605 421 A1

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(43)	Date of publication:
	13.07.1994 Bulletin 1994/28

(21)	Application number: 92906259.0

(22)	Date of filing: 27.12.1991

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International Patent Classification (IPC):

C04B 41/ 87^{( . )}
H01L 23/ 15^{( . )}

C03C 14/ 00^{( . )}
H05K 1/ 03^{( . )}

(86)	International application number:
	PCT/US1991/009751

(87)	International publication number:
	WO 1993/006053 (01.04.1993 Gazette 1993/09)

(84)	Designated Contracting States:
	DE FR GB

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Priority:

26.09.1991 US 19910765729

(71)	Applicant: International Business Machines Corporation
	Armonk, N.Y. 10504 (US)

(72)	Inventors:
	DAVID, Lawrence, Daniel Wappingers Falls, NY 12590-3646 (US) KNICKERBOCKER, Sarah, Huffsmith Hopewell Junction, NY 12533 (US)

(74)	Representative: Schuffenecker, Thierry
	Compagnie IBM France, Département de Propriété Intellectuelle F-06610 La Gaude F-06610 La Gaude (FR)

(54)	LOW DIELECTRIC CONSTANT SUBSTRATE AND METHOD OF MAKING