HARMONIC AND SUBHARMONIC ISOLATOR FOR PLASMA DISCHARGE - Patent 0609237

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EP 0 609 237 A1

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(43)	Date of publication:
	10.08.1994 Bulletin 1994/32

(21)	Application number: 92919678.0

(22)	Date of filing: 08.09.1992

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International Patent Classification (IPC):

C23C 16/ 50^{( . )}
H01J 37/ 32^{( . )}
H01L 21/ 302^{( . )}
H05H 1/ 46^{( . )}

C23F 4/ 00^{( . )}
H01L 21/ 205^{( . )}
H01L 21/ 3065^{( . )}

(86)	International application number:
	PCT/US1992/007566

(87)	International publication number:
	WO 1993/005630 (18.03.1993 Gazette 1993/08)

(84)	Designated Contracting States:
	DE FR GB

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Priority:

09.09.1991 US 19910756649
04.06.1992 US 19920893475

(71)	Applicant: SEMATECH, INC.
	Austin, TX 78741-6499 (US)

(72)	Inventor:
	MILLER, Paul, A. Albuquerque, NM 87123 (US)

(74)	Representative: Grünecker, Kinkeldey, Stockmair & Schwanhäusser Anwaltssozietät
	Maximilianstrasse 58 D-80538 München D-80538 München (DE)

(54)	HARMONIC AND SUBHARMONIC ISOLATOR FOR PLASMA DISCHARGE