(19)
(11) EP 0 630 467 A1

(12)

(43) Date of publication:
28.12.1994 Bulletin 1994/52

(21) Application number: 94903970.0

(22) Date of filing: 10.01.1994
(51) International Patent Classification (IPC): 
G01B 9/ 02( . )
G01D 5/ 48( . )
G01B 15/ 00( . )
G01J 9/ 04( . )
(86) International application number:
PCT/GB1994/000039
(87) International publication number:
WO 1994/016294 (21.07.1994 Gazette 1994/17)
(84) Designated Contracting States:
CH DE FR LI

(30) Priority: 13.01.1993 GB 19930000556

(71) Applicant: THE SECRETARY OF STATE FOR DEFENCE IN HER BRITANNIC MAJESTY'S GOVERNMENT OF THE UNITED KINGDOM OF GREAT BRITAIN AND
Farnborough, Hants. GU14 6TD (GB)

(72) Inventor:
  • LEWIS, Meirion, Francis 5 Churchdown Road
    Worcestershire WR14 3JX (GB)

(74) Representative: Beckham, Robert William, et al 
Defence Research Agency Intellectual Property Department DRA Farnborough R69 Building
Farnborough, Hants. GU14 6TD
Farnborough, Hants. GU14 6TD (GB)

   


(54) NANOMETER METROLOGY