(19)
(11) EP 0 642 599 A1

(12)

(43) Date of publication:
15.03.1995 Bulletin 1995/11

(21) Application number: 93910285.0

(22) Date of filing: 26.05.1993
(51) International Patent Classification (IPC): 
B24C 3/ 32( . )
B24C 11/ 00( . )
C23C 16/ 27( . )
B24C 5/ 08( . )
C23C 16/ 02( . )
(86) International application number:
PCT/GB1993/001082
(87) International publication number:
WO 1993/024676 (09.12.1993 Gazette 1993/29)
(84) Designated Contracting States:
DE FR GB IT NL

(30) Priority: 26.05.1992 GB 19920011107

(71) Applicant: BRITISH TECHNOLOGY GROUP LIMITED
London SE1 6BU (GB)

(72) Inventors:
  • JOHN, Phillip
    Juniper Green, Edinburgh EH14 5DQ (GB)
  • WILSON, John Ivor Barrett
    Balerno, Midlothian EH14 7DG (GB)
  • DRUMMOND, Iain Cameron
    Edinburgh EH12 8UN (GB)

(74) Representative: Gaskin, John Shield 
Patents Department British Technology Group Ltd 101 Newington Causeway
London SE1 6BU
London SE1 6BU (GB)

   


(54) DIAMOND FILM DEPOSITION