(19)

(11)

EP 0 645 008 A1

(12)

(43) Date of publication: 29.03.1995 Bulletin 1995/13 (21) Application number: 93914123.0 (22) Date of filing: 24.05.1993

(51) International Patent Classification (IPC):  G01N 21/ 27( . ) G01N 21/ 45( . ) H01L 21/ 027( . ) H01L 21/ 3065( . ) G01B 11/ 06( . ) G06T 1/ 00( . ) H01L 21/ 302( . ) (86) International application number: PCT/US1993/004936 (87) International publication number: WO 1993/025893 (23.12.1993 Gazette 1993/30)

(84) Designated Contracting States: BE DE FR GB NL (30) Priority: 09.06.1992 US 19920896137 (71) Applicant: LUXTRON CORPORATION Santa Clara, CA 95051 (US)	(72) Inventor: LITVAK, Herbert, E. Cupertino, CA 95014 (US) (74) Representative: Kopacz, William James  83, Avenue Foch F-75116 Paris F-75116 Paris (FR)