(19)

(11)

EP 0 647 354 A1

(12)

(43) Date of publication: 12.04.1995 Bulletin 1995/15 (21) Application number: 93910769.0 (22) Date of filing: 26.04.1993

(51) International Patent Classification (IPC):  H01L 21/ 77( . ) H01L 21/ 84( . ) (86) International application number: PCT/US1993/003854 (87) International publication number: WO 1994/023446 (13.10.1994 Gazette 1994/23)

(84) Designated Contracting States: FR GB NL (30) Priority: 31.03.1993 DE 19934310640 (71) Applicant: ADVANCED TECHNOLOGY INCUBATOR, INC. Farmington Hills, MI 48334 (US)	(72) Inventors: BRINKENSTEIN, Miki 31053 Haifa (IL) GLUCK, Joachim D-7000 Stuttgart 80 (DE) LUDER, Ernst D-7000 Stuttgart 80 (DE) (74) Representative: Möbus, Rudolf, Dipl.-Ing., et al  Dipl.-Ing. Rudolf Möbus, Dr.-Ing. Daniela Möbus, Dipl.-Ing. Gerhard Schwan, Hindenburgstrasse 65 D-72762 Reutlingen D-72762 Reutlingen (DE)