|
(11) | EP 0 650 020 A3 |
(12) | EUROPEAN PATENT APPLICATION |
|
|
|
|
|||||||||||||||||||||||||||
(54) | A ceramic heater and a method of manufacture thereof |
(57) This invention provides a ceramic heater of current self-control type, which has
no gap in the boundary between the enclosure 1 and the filler 2, and which has reduced
manufacturing cost, a stable strength and an improved heating performance. The invention
also provides a method of manufacturing such a ceramic heater. In this ceramics heater,
porous ceramic fillers 2, 3 are filled inside the end portions of the enclosure 1
made of a dense ceramics. The metal coil 10 consisting of the heater coil 6 and the
current control coil 9 connected in series with each other is installed inside the
enclosure 1, with the end surfaces 15 of the enclosure 1 hermetically closed by the
sealing films 4. To prevent corrosion of the metal coil 10, the low heat conductivity
ceramics 25 made from ceramic whiskers and/or ceramic powder is disposed in the central
portion of the enclosure 1 and an N2 gas is sealed therein. The heater coil 6 is arranged in contact with the inner wall
surface 7 of that portion of the enclosure 1 where the filler 2 is located, and the
current control coil 9 is spaced from the inner wall surface 8 of the enclosure 1
so as to be heat-insulated. |