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EP 0 662 269 A1

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(43) Date of publication: 12.07.1995 Bulletin 1995/28 (21) Application number: 94919307.0 (22) Date of filing: 31.05.1994

(51) International Patent Classification (IPC):  H01L 27/ 04( . ) H01L 27/ 144( . ) H01L 29/ 872( . ) H01L 21/ 822( . ) H01L 29/ 868( . ) H01L 29/ 93( . ) (86) International application number: PCT/US1994/006144 (87) International publication number: WO 1994/029960 (22.12.1994 Gazette 1994/28)

(84) Designated Contracting States: DE FR GB IT (30) Priority: 08.06.1993 IL 19930105952 (71) Applicants: RAMOT UNIVERSITY AUTHORITY FOR APPLIED RESEARCH & INDUSTRIAL DEVELOPMENT LTD. Tel Aviv 69975 (IL) NATHAM, Menachem Ramat Aviv, Tel Aviv (IL)

(72) Inventors: NATHAM, Menachem Ramat Aviv, Tel Aviv (IL) ASHKINAZI, German 69107 Tel Aviv (IL) MEYLER, Boris 52260 Ramat Gan (IL) ZOLOTAREVSKI, Leonid 62995 Tel Aviv (IL) ZOLOTAREVSKI, Olga 62995 Tel Aviv (IL) (74) Representative: Herrmann-Trentepohl, Werner, Dipl.-Ing., et al  Patentanwälte Herrmann-Trentepohl, Kirschner, Grosse, Bockhorni & Partner Forstenrieder Allee 59 D-81476 München D-81476 München (DE)