(19)
(11) EP 0 670 052 A1

(12)

(43) Date of publication:
06.09.1995 Bulletin 1995/36

(21) Application number: 94906428.0

(22) Date of filing: 15.11.1993
(51) International Patent Classification (IPC): 
G02B 3/ 00( . )
G03B 27/ 50( . )
G03F 7/ 20( . )
G02B 5/ 18( . )
G03F 7/ 00( . )
(86) International application number:
PCT/US1993/010945
(87) International publication number:
WO 1994/011781 (26.05.1994 Gazette 1994/12)
(84) Designated Contracting States:
CH DE FR GB IT LI NL SE

(30) Priority: 17.11.1992 GB 19920024080
30.08.1993 US 19930114732

(71) Applicants:
  • BROOK, John
    Basingstoke, Hants RG24 84D (GB)
  • PAGE, Joseph
    La Jolla, CA 92307 (US)

(72) Inventors:
  • HUGLE, William Bell
    CH-6614 Brissago (CH)
  • DANDLIKER, René
    CH-2000 Neuchâtel (CH)
  • HERZIG, Hans, Peter
    CH-2000 Neuchâtel (CH)

(74) Representative: Gibson, Stewart Harry 
URQUHART-DYKES & LORD, Three Trinity Court, 21-27 Newport Road
Cardiff CF2 1AA
Cardiff CF2 1AA (GB)

   


(54) LENS ARRAY PHOTOLITHOGRAPHY