THIN FILM TRANSISTOR HAVING A TRIPLE LAYER DIELECTRIC GATE INSULATOR, METHOD OF FABRICATING SUCH A THIN FILM TRANSISTOR AND AN ACTIVE MATRIX DISPLAY HAVING A PLURALITY OF SUCH THIN FILM TRANSISTORS - Patent 0672301

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EP 0 672 301 A1

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(43)	Date of publication:
	20.09.1995 Bulletin 1995/38

(21)	Application number: 92923642.0

(22)	Date of filing: 01.12.1992

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International Patent Classification (IPC):

H01L 21/ 34^{( . )}
H01L 21/ 473^{( . )}

H01L 21/ 471^{( . )}
H01L 29/ 49^{( . )}

(86)	International application number:
	PCT/CA1992/000519

(87)	International publication number:
	WO 1994/013018 (09.06.1994 Gazette 1994/13)

(84)	Designated Contracting States:
	DE FR GB NL

(71)	Applicant: LITTON SYSTEMS CANADA LIMITED
	Etobicoke Ontario M9W 5A7 (CA)

(72)	Inventor:
	WAECHTER, David Brampton, Ontario M9W 5A7 (CA)

(74)	Representative: Naismith, Robert Stewart
	CRUIKSHANK & FAIRWEATHER 19 Royal Exchange Square Glasgow, G1 3AE Scotland Glasgow, G1 3AE Scotland (GB)

(54)	THIN FILM TRANSISTOR HAVING A TRIPLE LAYER DIELECTRIC GATE INSULATOR, METHOD OF FABRICATING SUCH A THIN FILM TRANSISTOR AND AN ACTIVE MATRIX DISPLAY HAVING A PLURALITY OF SUCH THIN FILM TRANSISTORS