(19)
(11) EP 0 674 723 A1

(12)

(43) Date of publication:
04.10.1995 Bulletin 1995/40

(21) Application number: 94904442.0

(22) Date of filing: 14.12.1993
(51) International Patent Classification (IPC): 
C04B 41/ 87( . )
C23C 18/ 12( . )
C23C 28/ 04( . )
C04B 41/ 50( . )
C23C 24/ 08( . )
(86) International application number:
PCT/US1993/012150
(87) International publication number:
WO 1994/013853 (23.06.1994 Gazette 1994/14)
(84) Designated Contracting States:
DE ES FR GB IT

(30) Priority: 17.12.1992 US 19920991929

(71) Applicant: UNITED TECHNOLOGIES CORPORATION
Hartford, CT 06101 (US)

(72) Inventors:
  • XIAO, Youming
    Storrs, CT 06268 (US)
  • TAN, Beng Jit
    Storrs, CT 06268 (US)
  • SUIB, Steven, Lawrence
    Storrs, CT 06268 (US)
  • GALASSO, Francis, S.
    Manchester, CT 06040 (US)

(74) Representative: Klunker . Schmitt-Nilson . Hirsch 
Winzererstrasse 106
D-80797 München
D-80797 München (DE)

   


(54) METAL NITRIDE COATED SUBSTRATES