(19)

(11)

EP 0 676 088 A1

(12)

(43) Date of publication: 11.10.1995 Bulletin 1995/41 (21) Application number: 94907098.0 (22) Date of filing: 20.12.1993

(51) International Patent Classification (IPC):  G11C 16/ 04( . ) H01L 27/ 115( . ) H01L 29/ 788( . ) H01L 21/ 8247( . ) H01L 29/ 423( . ) H01L 29/ 792( . ) (86) International application number: PCT/US1993/012485 (87) International publication number: WO 1994/015363 (07.07.1994 Gazette 1994/15)

(84) Designated Contracting States: AT BE CH DE DK ES FR GB GR IE IT LI LU MC NL PT SE (30) Priority: 28.12.1992 US 19920997236 31.12.1992 US 19920999609 01.03.1993 US 19930024258 17.05.1993 US 19930062237 (71) Applicant: YU, Shih-Chiang Cupertino, CA 95014 (US)	(72) Inventor: YU, Shih-Chiang Cupertino, CA 95014 (US) (74) Representative: Witte, Alexander, Dr.-Ing., et al  Witte, Weller, Gahlert & Otten Patentanwälte Rotebühlstrasse 121 D-70178 Stuttgart D-70178 Stuttgart (DE)