(19)

(11)

EP 0 680 568 A1

(12)

(43) Date of publication: 08.11.1995 Bulletin 1995/45 (21) Application number: 93903333.0 (22) Date of filing: 09.02.1993

(51) International Patent Classification (IPC):  F16C 33/ 10( . ) (86) International application number: PCT/JP1993/000166 (87) International publication number: WO 1994/018464 (18.08.1994 Gazette 1994/19)

(84) Designated Contracting States: AT BE CH DE ES FR GB IT LI NL SE (71) Applicant: EBARA CORPORATION Ohta-ku Tokyo,144 (JP)	(72) Inventors: KONNO, Daisuke Ohta-ku, Tokyo 144 (JP) NODA, Yumiko Ohta-ku, Tokyo 144 (JP) (74) Representative: Wagner, Karl H., et al  WAGNER & GEYER Patentanwälte Gewürzmühlstrasse 5 D-80538 München D-80538 München (DE)