(19)
(11) EP 0 686 211 A1

(12)

(43) Date of publication:
13.12.1995 Bulletin 1995/50

(21) Application number: 94909756.0

(22) Date of filing: 18.02.1994
(51) International Patent Classification (IPC): 
C23C 14/ 34( . )
C23C 14/ 50( . )
G11B 5/ 85( . )
H01F 41/ 18( . )
H01L 21/ 00( . )
 C23C 14/ 35( . )
G11B 5/ 84( . )
G11B 5/ 851( . )
H01J 37/ 34( . )
(86) International application number:
PCT/US1994/001896
(87) International publication number:
WO 1994/019508 (01.09.1994 Gazette 1994/20)
(84) Designated Contracting States:
AT BE CH DE DK ES FR GB GR IE IT LI LU MC NL PT SE

(30) Priority: 19.02.1993 US 19930019794

(71) Applicant: CONNER PERIPHERALS, INC.
San Jose, CA 95134-2158 (US)

(72) Inventors:
  • HOLLARS, Dennis R.
    Los Gatos, CA 95030 (US)
  • BONIGUT, Josef
    Alamo, CA 94507 (US)
  • WARD, Keith A.
    San Jose, CA 95118 (US)

(74) Representative: Robinson, Nigel Alexander Julian, et al 
D. Young & Co., 21 New Fetter Lane
London EC4A 1DA
London EC4A 1DA (GB)

   


(54) SYSTEM FOR SPUTTERING COMPOSITIONS ONTO A SUBSTRATE