FABRICATION PROCESS FOR CMOS DEVICE WITH JFET - Patent 0686305

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EP 0 686 305 A1

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(43)	Date of publication:
	13.12.1995 Bulletin 1995/50

(21)	Application number: 94909780.0

(22)	Date of filing: 18.02.1994

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International Patent Classification (IPC):

H01L 27/ 092^{( . )}
H01L 21/ 8238^{( . )}
H01L 29/ 808^{( . )}

H01L 21/ 337^{( . )}
H01L 27/ 085^{( . )}

(86)	International application number:
	PCT/US1994/001990

(87)	International publication number:
	WO 1994/019828 (01.09.1994 Gazette 1994/20)

(84)	Designated Contracting States:
	DE FR GB

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Priority:

25.02.1993 US 19930023798

(71)	Applicant: NATIONAL SEMICONDUCTOR CORPORATION
	Santa Clara, California 95052-8090 (US)

(72)	Inventors:
	MERRILL, Richard, B. Daly City, CA 94014 (US) FARRENKOPF, Doug, R. Santa Clara, CA 95051 (US)

(74)	Representative: Bowles, Sharon Margaret, et al
	BOWLES HORTON Felden House Dower Mews High Street Berkhamsted Hertfordshire HP4 2BL Berkhamsted Hertfordshire HP4 2BL (GB)

(54)	FABRICATION PROCESS FOR CMOS DEVICE WITH JFET