METHOD AND APPARATUS FOR DOPING A SOLID MATERIAL - Patent 0689722

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EP 0 689 722 A1

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(43)	Date of publication:
	03.01.1996 Bulletin 1996/01

(21)	Application number: 93905317.0

(22)	Date of filing: 08.03.1993

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International Patent Classification (IPC):

C30B 31/ 06^{( . )}
H01L 21/ 228^{( . )}
H01L 21/ 479^{( . )}

C25D 15/ 02^{( . )}
H01L 21/ 38^{( . )}
H01L 39/ 24^{( . )}

(86)	International application number:
	PCT/EP1993/000522

(87)	International publication number:
	WO 1994/020991 (15.09.1994 Gazette 1994/21)

(84)	Designated Contracting States:
	DE FR GB

(71)	Applicant: International Business Machines Corporation
	Armonk, N.Y. 10504 (US)

(72)	Inventors:
	GERBER, Christoph CH-8805 Richterswil (CH) LOCQUET, Jean-Pierre CH-8803 Rüschlikon (CH)

(74)	Representative: Barth, Carl Otto, et al
	International Business Machines Corp. Zurich Research Laboratory Intellectual Property Department Säumerstrasse 4 CH-8803 Rüschlikon CH-8803 Rüschlikon (CH)

(54)	METHOD AND APPARATUS FOR DOPING A SOLID MATERIAL