(19)

(11)

EP 0 693 224 A1

(12)

(43) Date of publication: 24.01.1996 Bulletin 1996/04 (21) Application number: 94911106.0 (22) Date of filing: 02.04.1994

(51) International Patent Classification (IPC):  H01L 29/ 73( . ) H01L 29/ 80( . ) H01L 33/ 38( . ) H01L 21/ 331( . ) H01L 33/ 34( . ) H01L 33/ 40( . ) (86) International application number: PCT/DE1994/000383 (87) International publication number: WO 1994/023456 (13.10.1994 Gazette 1994/23)

(84) Designated Contracting States: BE DE FR GB IT NL SE (30) Priority: 07.04.1993 DE 19934311388 (71) Applicant: FORSCHUNGSZENTRUM JÜLICH GMBH D-52425 Jülich (DE)	(72) Inventors: MARSO, Michel D-52428 Jülich (DE) SCHÜPPEN, Andreas D-89075 Ulm (DE) MÜNDER, Herbert D-50129 Bergheim (DE) BERGER, Michael, Götz D-53343 Wachtberg-Pech (DE) LÜTH, Hans D-52076 Aachen (DE)