(19)

(11)

EP 0 698 230 A1

(12)

(43) Date of publication: 28.02.1996 Bulletin 1996/09 (21) Application number: 94900495.0 (22) Date of filing: 29.10.1993

(51) International Patent Classification (IPC):  G03F 7/ 004( . ) H01L 21/ 027( . ) G03F 7/ 039( . ) (86) International application number: PCT/US1993/010512 (87) International publication number: WO 1994/010608 (11.05.1994 Gazette 1994/11)

(84) Designated Contracting States: DE FR GB (30) Priority: 29.10.1992 US 19920968120 (71) Applicant: International Business Machines Corporation Armonk, N.Y. 10504 (US)

(72) Inventors: BRUNSVOLD, William, Ross Poughkeepsie, NY 12603 (US) BREYTA, Gregory San Jose, CA 95120 (US) DIPIETRO, Richard, Anthony San Jose, CA 95120 (US) ITO, Hiroshi San Jose, CA 95120 (US) KNORS, Christopher, John Bound Brook, NJ 08805 (US) KWONG, Ranee, Wai-Ling Wappingers Falls, NY 12590 (US) MIURA, Steve, Seiichi Poughkeepsie, NY 12603 (US) MONTGOMERY, Melvin, Warren New Windsor, NY 12550 (US) MOREAU, Wayne, Martin Wappingers Falls, NY 12590 (US) SACHDEV, Harbans, Singh Wappingers Falls, NY 12590 (US) WELSH, Kevin, Michael Fishkill, NY 12524 (US) (74) Representative: Schuffenecker, Thierry, et al  Compagnie IBM France, Département de Propriété Intellectuelle F-06610 La Gaude F-06610 La Gaude (FR)