(19)

(11)

EP 0 702 775 A1

(12)

(43) Date of publication: 27.03.1996 Bulletin 1996/13 (21) Application number: 95911781.0 (22) Date of filing: 15.02.1995

(51) International Patent Classification (IPC):  C30B 25/ 12( . ) C30B 35/ 00( . ) C30B 31/ 14( . ) H01L 21/ 00( . ) (86) International application number: PCT/US1995/002008 (87) International publication number: WO 1995/023427 (31.08.1995 Gazette 1995/37)

(84) Designated Contracting States: CH DE GB LI NL (30) Priority: 17.02.1994 KR 19940002820 (71) Applicant: VARIAN ASSOCIATES, INC. Palo Alto, California 94304-1030 (US)	(72) Inventors: KYUNG, Hyun-Su Kyungki-Do (KR) CHOI, Won-Song Kyungki-Do (KR) SHIN, Jung-Ho Kyungki-Do (KR) (74) Representative: Cline, Roger Ledlie  EDWARD EVANS & CO. Chancery House 53-64 Chancery Lane London WC2A 1SD London WC2A 1SD (GB)