METHOD OF ELIMINATING POLY END CAP ROUNDING EFFECT - Patent 0702848

(19)

(11)

EP 0 702 848 A1

(12)

(43)	Date of publication:
	27.03.1996 Bulletin 1996/13

(21)	Application number: 94919335.0

(22)	Date of filing: 03.06.1994

(51)

International Patent Classification (IPC):

H01L 21/ 8247^{( . )}

(86)	International application number:
	PCT/US1994/006224

(87)	International publication number:
	WO 1994/029898 (22.12.1994 Gazette 1994/28)

(84)	Designated Contracting States:
	DE FR GB

(30)

Priority:

11.06.1993 US 19930075813

(71)	Applicant: NATIONAL SEMICONDUCTOR CORPORATION
	Santa Clara, California 95052 (US)

(72)	Inventor:
	BERGEMONT, Albert Santa Clara, CA 95014 (US)

(74)	Representative: Bowles, Sharon Margaret, et al
	BOWLES HORTON Felden House Dower Mews High Street Berkhamsted Hertfordshire HP4 2BL Berkhamsted Hertfordshire HP4 2BL (GB)

(54)	METHOD OF ELIMINATING POLY END CAP ROUNDING EFFECT