MANUFACTURE OF ELECTRONIC DEVICES COMPRISING THIN-FILM TRANSISTORS - Patent 0702852

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EP 0 702 852 A1

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(43)	Date of publication:
	27.03.1996 Bulletin 1996/13

(21)	Application number: 95910710.0

(22)	Date of filing: 21.03.1995

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International Patent Classification (IPC):

H01L 21/ 336^{( . )}
G02F 1/ 1368^{( . )}

H01L 29/ 786^{( . )}

(86)	International application number:
	PCT/IB1995/000191

(87)	International publication number:
	WO 1995/028001 (19.10.1995 Gazette 1995/45)

(84)	Designated Contracting States:
	DE FR GB IT NL

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Priority:

07.04.1994 GB 19940006900

(71)	Applicants:
	PHILIPS ELECTRONICS N.V. NL-5621 BA Eindhoven (NL) PHILIPS ELECTRONICS UK LIMITED Croydon CR9 3QR (GB)

(72)	Inventors:
	YOUNG, Nigel, David Redhill Surrey RH1 GLU (GB) AYRES, John, Richard, Alan Reigate Surrey RH2 9H4 (GB)

(74)	Representative: Stevens, Brian Thomas, et al
	Internationaal Octrooibureau B.V., Prof. Holstlaan 6 NL-5656 AA Eindhoven NL-5656 AA Eindhoven (NL)

(54)	MANUFACTURE OF ELECTRONIC DEVICES COMPRISING THIN-FILM TRANSISTORS