(19)

(11)

EP 0 707 663 A1

(12)

(43) Date of publication: 24.04.1996 Bulletin 1996/17 (21) Application number: 94921324.0 (22) Date of filing: 17.06.1994

(51) International Patent Classification (IPC):  C23C 14/ 34( . ) C23C 14/ 35( . ) H01J 37/ 34( . ) C23C 14/ 00( . ) C23C 14/ 56( . ) (86) International application number: PCT/US1994/006908 (87) International publication number: WO 1995/000677 (05.01.1995 Gazette 1995/02)

(84) Designated Contracting States: AT BE CH DE DK ES FR GB GR IE IT LI LU MC NL PT SE (30) Priority: 17.06.1993 US 19930078766 (71) Applicant: DEPOSITION SCIENCES, INC. Santa Rosa California 95401 (US)	(72) Inventors: BARTOLOMEI, Leroy, Albert Santa Rosa, CA 95404 (US) READ, Thomas Santa Rosa, CA 95403 (US) (74) Representative: Pendlebury, Anthony, et al  PAGE, WHITE & FARRER 54 Doughty Street London WC1N 2LS London WC1N 2LS (GB)