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EP 0 707 741 A1

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(43) Date of publication: 24.04.1996 Bulletin 1996/17 (21) Application number: 95918863.0 (22) Date of filing: 04.05.1995

(51) International Patent Classification (IPC):  H01L 21/ 822( . ) H01L 23/ 367( . ) H01L 23/ 48( . ) H01L 27/ 04( . ) H01L 23/ 29( . ) H01L 23/ 373( . ) H01L 23/ 485( . ) (86) International application number: PCT/US1995/005217 (87) International publication number: WO 1995/031006 (16.11.1995 Gazette 1995/49)

(84) Designated Contracting States: DE FR IT NL (30) Priority: 05.05.1994 US 19940238552 12.10.1994 US 19940321937 (71) Applicant: SILICONIX INCORPORATED Santa Clara, California 95054 (US)

(72) Inventors: CHANG, Mike, F. Cupertino, CA 95014 (US) OWYANG, King Atherton, CA 94026 (US) HSHIEH, Fwu-Iuan Saratoga, CA 95070 (US) HO, Yueh-Se Sunnyvale, CA 94086 (US) DUN, Jowei San Jose, CA 95127 (US) FÜSSER, Hans-Jürgen D-89547 Gerstetten-Dettingen (DE) ZACHAI, Reinhard D-89312 Günzburg (DE) (74) Representative: Freeman, Jacqueline Carol, et al  W.P. THOMPSON & CO. Celcon House 289-293 High Holborn London WC1V 7HU London WC1V 7HU (GB)