(19)

(11)

EP 0 708 982 A1

(12)

(43) Date of publication: 01.05.1996 Bulletin 1996/18 (21) Application number: 95918082.0 (22) Date of filing: 10.05.1995

(51) International Patent Classification (IPC):  H01L 21/ 312( . ) H01L 21/ 316( . ) (86) International application number: PCT/GB1995/001057 (87) International publication number: WO 1995/031823 (23.11.1995 Gazette 1995/50)

(84) Designated Contracting States: AT BE CH DE ES FR GB IE IT LI NL SE (30) Priority: 14.05.1994 GB 19940009713 (71) Applicant: ELECTROTECH EQUIPMENTS LIMITED Bristol BS12 1NP (GB)	(72) Inventors: DOBSON, Christopher, David Bristol BS12 3AA (GB) KIERMASZ, Adrian Avon Bristol BS12 7UW (GB) (74) Representative: Dunlop, Brian Kenneth Charles, et al  c/o Wynne-Jones, Lainé & James 22 Rodney Road Cheltenham Gloucestershire GL50 1JJ Cheltenham Gloucestershire GL50 1JJ (GB)