POST TREATMENT OF A COATED SUBSTRATE WITH A GAS CONTAINING EXCITED HALOGEN TO REMOVE RESIDUES

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EP 0 710 161 A1

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(43)	Date of publication:
	08.05.1996 Bulletin 1996/19

(21)	Application number: 94922123.0

(22)	Date of filing: 12.07.1994

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International Patent Classification (IPC):

G03F 7/ 36^{( . )}
B08B 5/ 00^{( . )}
C03C 17/ 32^{( . )}
C23F 1/ 00^{( . )}
C23F 4/ 00^{( . )}
G03F 7/ 42^{( . )}
H01L 21/ 306^{( . )}
H05K 3/ 26^{( . )}

B08B 3/ 02^{( . )}
B08B 6/ 00^{( . )}
C03C 23/ 00^{( . )}
C23F 1/ 12^{( . )}
C23G 5/ 00^{( . )}
H01L 21/ 302^{( . )}
H01L 21/ 311^{( . )}

(86)	International application number:
	PCT/US1994/007751

(87)	International publication number:
	WO 1995/002472 (26.01.1995 Gazette 1995/05)

(84)	Designated Contracting States:
	DE

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Priority:

16.07.1993 US 19930092417

(71)	Applicant: FUSION SYSTEMS CORPORATION
	Rockville, MD 20855-2798 (US)

(72)	Inventors:
	SPARKS, Eileen, R. Clarksburg, MD 20871 (US) MITCHENER, James, C. Damascus, MD 20872 (US) ROUNDS, Stuart, N. Germantown, MD 20874 (US) MATTHEWS, John, C. Gaithersburg, MD 20871 (US)

(74)	Representative: Schwepfinger, Karl-Heinz, Dipl.-Ing.
	Prinz & Partner, Manzingerweg 7 D-81241 München D-81241 München (DE)

(54)	POST TREATMENT OF A COATED SUBSTRATE WITH A GAS CONTAINING EXCITED HALOGEN TO REMOVE RESIDUES