(19)

(11)

EP 0 711 457 A1

(12)

(43) Date of publication: 15.05.1996 Bulletin 1996/20 (21) Application number: 94921241.0 (22) Date of filing: 02.06.1994

(51) International Patent Classification (IPC):  H01L 29/ 73( . ) H01L 21/ 76( . ) H01L 29/ 40( . ) H01L 21/ 331( . ) H01L 29/ 06( . ) H01L 29/ 78( . ) (86) International application number: PCT/US1994/006315 (87) International publication number: WO 1995/004374 (09.02.1995 Gazette 1995/07)

(84) Designated Contracting States: DE FR GB IT (30) Priority: 29.07.1993 US 19930099282 (71) Applicant: SIEMENS COMPONENTS, Inc. Iselin, New Jersey 08830 (US)	(72) Inventor: WHITNEY, David San Jose, CA 95127 (US) (74) Representative: Fuchs, Franz-Josef, Dr.-Ing., et al  Postfach 22 13 17 D-80503 München D-80503 München (DE)