(19)

(11)

EP 0 728 224 A1

(12)

(43) Date of publication: 28.08.1996 Bulletin 1996/35 (21) Application number: 95931033.0 (22) Date of filing: 29.08.1995

(51) International Patent Classification (IPC):  C23C 14/ 34( . ) H01J 37/ 34( . ) C23C 14/ 00( . ) H01L 21/ 203( . ) (86) International application number: PCT/US1995/011039 (87) International publication number: WO 1996/007769 (14.03.1996 Gazette 1996/12)

(84) Designated Contracting States: CH DE GB LI (30) Priority: 03.09.1994 KR 19920022171 (71) Applicant: VARIAN ASSOCIATES, INC. Palo Alto, California 94304-1030 (US)	(72) Inventors: OH, Kyu-Woon Kyungki-do 459-040 (KR) LEE, Chang-Kun Kyungki-do 459-040 (KR) KIM, Myung-Kil Kyungki-do 459-040 (KR) (74) Representative: Cline, Roger Ledlie, et al  EDWARD EVANS & CO. Chancery House 53-64 Chancery Lane London WC2A 1SD London WC2A 1SD (GB)