METHODS FOR IMPROVING SEMICONDUCTOR PROCESSING - Patent 0741909

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EP 0 741 909 A1

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(43)	Date of publication:
	13.11.1996 Bulletin 1996/46

(21)	Application number: 95907316.0

(22)	Date of filing: 12.01.1995

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International Patent Classification (IPC):

C23C 14/ 24^{( . )}
C23C 16/ 44^{( . )}
C23F 4/ 00^{( . )}
H01L 21/ 302^{( . )}
H01L 21/ 306^{( . )}

C23C 16/ 02^{( . )}
C23C 16/ 54^{( . )}
H01L 21/ 205^{( . )}
H01L 21/ 304^{( . )}
H01L 21/ 3065^{( . )}

(86)	International application number:
	PCT/US1995/000131

(87)	International publication number:
	WO 1995/020823 (03.08.1995 Gazette 1995/33)

(84)	Designated Contracting States:
	DE FR GB IE IT

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Priority:

27.01.1994 US 19940229450
27.06.1994 US 19940266929

(71)	Applicant: Insync Systems, Inc.
	Santa Clara, CA 95050 (US)

(72)	Inventors:
	BALMA, Frank, R. Fremont, CA 94536 (US) ELLIOT, Brent, D. San Jose, CA 95110 (US)

(74)	Representative: Thomson, Paul Anthony
	Potts, Kerr & Co. 15, Hamilton Square Birkenhead Merseyside L41 6BR Birkenhead Merseyside L41 6BR (GB)

(54)	METHODS FOR IMPROVING SEMICONDUCTOR PROCESSING