(19)

(11)

EP 0 752 017 A1

(12)

(43) Date of publication: 08.01.1997 Bulletin 1997/02 (21) Application number: 95910130.0 (22) Date of filing: 25.01.1995

(51) International Patent Classification (IPC):  C23C 14/ 34( . ) H01L 21/ 285( . ) H01L 21/ 203( . ) (86) International application number: PCT/US1995/001089 (87) International publication number: WO 1996/023085 (01.08.1996 Gazette 1996/35)

(84) Designated Contracting States: AT BE CH DE ES FR GB GR IE IT LI NL SE (71) Applicant: Applied Komatsu Technology, Inc. Santa Clara 95054 (US)	(72) Inventors: DEMARAY, Richard Ernest Portola Valley, CA 94028 (US) HERRERA, Manuel San Mateo, CA 94402 (US) (74) Representative: Bayliss, Geoffrey Cyril, et al  BOULT, WADE & TENNANT 27 Furnival Street London EC4A 1PQ London EC4A 1PQ (GB)