(19)

(11)

EP 0 757 598 A1

(12)

(43) Date of publication: 12.02.1997 Bulletin 1997/07 (21) Application number: 96906197.0 (22) Date of filing: 23.01.1996

(51) International Patent Classification (IPC):  B23K 15/ 00( . ) C23C 14/ 58( . ) H01J 27/ 14( . ) H01L 21/ 203( . ) C23C 14/ 22( . ) C23C 26/ 02( . ) H01J 37/ 317( . ) (86) International application number: PCT/US1996/001000 (87) International publication number: WO 1996/022841 (01.08.1996 Gazette 1996/35)

(84) Designated Contracting States: BE CH DE DK FR GB IT LI NL (30) Priority: 23.01.1995 US 19950376702 (71) Applicant: SANDIA CORPORATION Albuquerque, New Mexico 87185 (US)	(72) Inventor: STINNETT, Regan, W. Albuquerque, NM 87122 (US) (74) Representative: UEXKÜLL & STOLBERG  Patentanwälte Beselerstrasse 4 22607 Hamburg 22607 Hamburg (DE)