(19)

(11)

EP 0 758 310 A1

(12)

(43) Date of publication: 19.02.1997 Bulletin 1997/08 (21) Application number: 96908623.0 (22) Date of filing: 28.02.1996

(51) International Patent Classification (IPC):  C04B 35/ 565( . ) C04B 38/ 00( . ) C30B 25/ 02( . ) C04B 35/ 573( . ) C04B 41/ 87( . ) H01L 21/ 02( . ) (86) International application number: PCT/US1996/002880 (87) International publication number: WO 1996/026910 (06.09.1996 Gazette 1996/40)

(84) Designated Contracting States: AT BE CH DE DK ES FR GB GR IE IT LI LU MC NL PT SE (30) Priority: 01.03.1995 US 19950396970 (71) Applicant: Saint-Gobain/Norton Industrial Ceramics Corporation Worcester, MA 01615-0138 (US)	(72) Inventors: WILLKENS, Craig, A. Worcester, MA 01605 (US) ARSENAULT, Normand, P. Holden, MA 01520 (US) (74) Representative: Richebourg, Michel François  Cabinet Michel Richebourg, "Le Clos du Golf", 69, rue Saint-Simon 42000 Saint Etienne 42000 Saint Etienne (FR)