(19)

(11)

EP 0 765 190 A1

(12)

(43) Date of publication: 02.04.1997 Bulletin 1997/14 (21) Application number: 94920813.0 (22) Date of filing: 27.06.1994

(51) International Patent Classification (IPC):  H01J 49/ 34( . ) H01J 49/ 42( . ) (86) International application number: PCT/US1994/007176 (87) International publication number: WO 1995/000237 (05.01.1995 Gazette 1995/02)

(84) Designated Contracting States: AT BE CH DE DK ES FR GB GR IE IT LI LU MC NL PT SE (30) Priority: 28.06.1993 US 19930083972 (71) Applicant: TELEDYNE INDUSTRIES, INC. Mountain View, California 94039-7127 (US)	(72) Inventor: KELLEY, Paul, E. San Jose, CA 95148 (US) (74) Representative: Blumbach Weser Bergen Kramer Zwirner Hoffmann Patentanwälte  Radeckestrasse 43 81245 München 81245 München (DE)