(19)
(11) EP 0 767 969 A1

(12)

(43) Date of publication:
16.04.1997 Bulletin 1997/16

(21) Application number: 95923462.0

(22) Date of filing: 29.06.1995
(51) International Patent Classification (IPC): 
H01L 21/ 20( . )
(86) International application number:
PCT/GB1995/001541
(87) International publication number:
WO 1996/000979 (11.01.1996 Gazette 1996/03)
(84) Designated Contracting States:
BE DE ES FR GB IT NL

(30) Priority: 29.06.1994 EP 19940304754

(71) Applicant: BRITISH TELECOMMUNICATIONS public limited company
London EC1A 7AJ (GB)

(72) Inventors:
  • SPURDENS, Paul, Charles
    Woodbridge Suffolk IP12 1JD (GB)
  • SALTER, Mark, Andrew
    Ipswich Suffolk IP3 9RA (GB)
  • HARLOW, Michael, John
    Ipswich Suffolk IP10 0XF (GB)
  • NEWSON, David, John
    Ipswich Suffolk IP1 2HT (GB)

   


(54) PREPARATION OF SEMICONDUCTOR SUBSTRATES