| (84) |
Designated Contracting States: |
|
BE DE FR GB IT NL |
| (30) |
Priority: |
10.10.1995 US 5013
18.04.1996 US 634449
10.09.1996 US 711781
|
| (43) |
Date of publication of application: |
|
16.04.1997 Bulletin 1997/16 |
| (73) |
Proprietor: L'AIR LIQUIDE, Société Anonyme pour l'Etude
et l'Exploitation des Procédés Georges Claude |
|
75007 Paris (FR) |
|
| (72) |
Inventors: |
|
- Mc Andrew, James J.F.
Lockport,
Illinois 60441 (US)
- Wang, Hwa-Chi
Naperville,
Illinois 60540 (US)
- Jurcik, Benjamin J.
Lisle,
Illinois 60532 (US)
|
| (74) |
Representative: Vesin, Jacques et al |
|
L'Air Liquide S.A.
Service Propriété Industrielle,
75 Quai d'Orsay
75321 Paris Cedex 07
75321 Paris Cedex 07 (FR) |
| (56) |
References cited: :
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MAY 20 - 24, 1991, no. SYMP. 24, 20 May 1991, NUCLEARE E DELLE ENERGIE ALTERNATIVE
(ENEA), pages 283-287, XP000308622
- FRIED A: "VERSATILE INTEGRATED TUNABLE DIODE LASER SYSTEM FOR HIGH PRECISION: APPLICATION
FOR AMBIENT MEASUREMENTS OF OCS" APPLIED OPTICS, vol. 30, no. 15, 20 May 1991, pages
1916-32, XP000207533
- JASINSKI ET AL: "DETECTION OF SIH2 IN SILANE AND DISILANE GLOW DISCHARGES BY FREQUENCY
MODULATION ABSORPTION SPECTROSCOPY" APPLIED PHYSICS LETTERS, vol. 44, no. 12, June
1984, pages 1155-1157, XP002036448
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PLASMAS" JOURNAL OF APPLIED PHYSICS, vol. 71, no. 12, 15 June 1992, pages 6125-6135,
XP000301544
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