Method for repairing a low noise address line for thin film imager devices

(19)

(11)

EP 0 780 719 A3

(12)	EUROPEAN PATENT APPLICATION

(88)	Date of publication A3:
	02.07.1997 Bulletin 1997/27

(43)	Date of publication A2:
	25.06.1997 Bulletin 1997/26

(21)	Application number: 96309108.7

(22)	Date of filing: 13.12.1996

(51)	International Patent Classification (IPC)⁶: G02F 1/13, H01L 21/48, H01L 27/146, G02F 1/136

(84)	Designated Contracting States:
	DE FR NL

(30)

Priority:

18.12.1995 US 574061

(71)	Applicant: GENERAL ELECTRIC COMPANY
	Schenectady, NY 12345 (US)

(72)	Inventor:
	Salisbury, Roger Stephen Niskayuna, New York 12309 (US)

(74)	Representative: Goode, Ian Roy et al
	London Patent Operation General Electric International, Inc., Essex House, 12-13 Essex Street London WC2R 3AA London WC2R 3AA (GB)

(54)	Method for repairing a low noise address line for thin film imager devices

(57) A method of repairing an open circuit defect in a damaged address line in a thin film electronic imager array is provided that includes the steps of forming a repair area (145) exposing the open circuit defect and portions of the damaged address line (120) adjoining the defect, with a first protective layer (150) disposed over the array surrounding the repair area; depositing a layer of conductive repair material (160) over the array so that a portion of the conductive repair material is disposed in the repair area to form a repair shunt (165) electrically connecting the portions of the address line (120) adjoining the defect; forming a planarized second protective layer (170) over the array; removing portions of the second protective layer (170) to form a planarized surface on the array on which the conductive repair material (160) is exposed except for the repair shunt (165) underlying a plug portion of the second protective layer disposed over the repair area; removing the conductive repair material (160) from the array surface except for the portion underlying the plug portion of the second protective layer; and removing remaining portions of the first protective layer (150) and the second protective layer plug portion from the repair area (145).

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