(19)
(11)
EP 0 782 542 A1
(12)
(43)
Date of publication:
09.07.1997
Bulletin 1997/28
(21)
Application number:
95925485.0
(22)
Date of filing:
05.07.1995
(51)
International Patent Classification (IPC):
C01B
21/
068
( . )
C04B
35/
591
( . )
(86)
International application number:
PCT/US1995/008418
(87)
International publication number:
WO 1996/001229
(
18.01.1996
Gazette 1996/04)
(84)
Designated Contracting States:
DE ES FR GB IT
(30)
Priority:
05.07.1994
US 19940270613
(71)
Applicant:
EATON CORPORATION
Cleveland, Ohio 44114-2584 (US)
(72)
Inventor:
EDLER, James, P.
Troy, MI 48098 (US)
(74)
Representative:
Burke, Steven David, et al
R.G.C. Jenkins & Co. 26 Caxton Street
London SW1H 0RJ
London SW1H 0RJ (GB)
(54)
METHOD OF NITRIDING SILICON