(19)
(11) EP 0 782 542 A1

(12)

(43) Date of publication:
09.07.1997 Bulletin 1997/28

(21) Application number: 95925485.0

(22) Date of filing: 05.07.1995
(51) International Patent Classification (IPC): 
C01B 21/ 068( . )
C04B 35/ 591( . )
(86) International application number:
PCT/US1995/008418
(87) International publication number:
WO 1996/001229 (18.01.1996 Gazette 1996/04)
(84) Designated Contracting States:
DE ES FR GB IT

(30) Priority: 05.07.1994 US 19940270613

(71) Applicant: EATON CORPORATION
Cleveland, Ohio 44114-2584 (US)

(72) Inventor:
  • EDLER, James, P.
    Troy, MI 48098 (US)

(74) Representative: Burke, Steven David, et al 
R.G.C. Jenkins & Co. 26 Caxton Street
London SW1H 0RJ
London SW1H 0RJ (GB)

   


(54) METHOD OF NITRIDING SILICON