FORMING A PLANAR SURFACE OVER A SUBSTRATE BY MODIFYING THE TOPOGRAPHY OF THE SUBSTRATE - Patent 0791227

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(11)

EP 0 791 227 A1

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(43)	Date of publication:
	27.08.1997 Bulletin 1997/35

(21)	Application number: 95940684.0

(22)	Date of filing: 13.11.1995

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International Patent Classification (IPC):

B26F 3/ 02^{( . )}
B26F 3/ 00^{( . )}
B65H 35/ 07^{( . )}
H01L 21/ 304^{( . )}
H01L 21/ 762^{( . )}

B26D 7/ 08^{( . )}
B65C 9/ 18^{( . )}
B65H 35/ 10^{( . )}
H01L 21/ 76^{( . )}
H01L 23/ 14^{( . )}

(86)	International application number:
	PCT/US1995/014681

(87)	International publication number:
	WO 1996/015552 (23.05.1996 Gazette 1996/23)

(84)	Designated Contracting States:
	DE FR GB IT

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Priority:

10.11.1994 US 19940337000

(71)	Applicant: INTEL CORPORATION
	Santa Clara, CA 95052 (US)

(72)	Inventors:
	MOON, Peter, K. Portland, OR 97201 (US) SARANGI, Ananda, G. Beaverton, OR 97007 (US) DEETER, Timothy, L. Portland, OR 97229 (US)

(74)	Representative: Wombwell, Francis, et al
	Potts, Kerr & Co. 15, Hamilton Square Birkenhead Merseyside L41 6BR Birkenhead Merseyside L41 6BR (GB)

(54)	FORMING A PLANAR SURFACE OVER A SUBSTRATE BY MODIFYING THE TOPOGRAPHY OF THE SUBSTRATE