|
(11) | EP 0 793 019 A3 |
(12) | EUROPEAN PATENT APPLICATION |
|
|
|
|
|||||||||||||||||||
(54) | Improvements in vacuum pumps |
(57) A vacuum pump which comprises a multi-stage reciprocating piston mode of operation
in which piston reciprocation is effected by electromagnetic drive means and a counter-acting
spring means and in which the pump stages are connected in series between a pump inlet
and a pump outlet such that, in use, gas being transferred through the pump passes
through the stages in turn. |