ROTATABLE MAGNETRON WITH CURVED OR SEGMENTED END MAGNETS - Patent 0805880

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EP 0 805 880 A1

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(43)	Date of publication:
	12.11.1997 Bulletin 1997/46

(21)	Application number: 96904456.0

(22)	Date of filing: 11.01.1996

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International Patent Classification (IPC):

C23C 14/ 35^{( . )}
H01J 37/ 34^{( . )}

C23C 14/ 34^{( . )}

(86)	International application number:
	PCT/US1996/000409

(87)	International publication number:
	WO 1996/021750 (18.07.1996 Gazette 1996/33)

(84)	Designated Contracting States:
	BE CH DE FR GB IT LI LU NL

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Priority:

12.01.1995 US 19950372023

(71)	Applicant: THE BOC GROUP, INC.
	Murray Hill, New Providence, New Jersey 07974 (US)

(72)	Inventors:
	LEHAN, John, P. Benicia, CA 94510 (US) BYORUM, Henry Sunnyvale, CA 94586 (US)

(74)	Representative: Bousfield, Roger James, et al
	The BOC Group plc Chertsey Road Windlesham Surrey GU20 6HJ Windlesham Surrey GU20 6HJ (GB)

(54)	ROTATABLE MAGNETRON WITH CURVED OR SEGMENTED END MAGNETS