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EP 0 806 780 B1 |
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EUROPEAN PATENT SPECIFICATION |
| (45) |
Mention of the grant of the patent: |
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02.08.2000 Bulletin 2000/31 |
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Date of filing: 09.05.1996 |
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Zinc phosphate coating for varistor and method
Zink-Phosphatbeschichtung für Varistor und Verfahren zur Herstellung
Revêtement en phosphate de zinc pour varistor et méthode de fabrication
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Designated Contracting States: |
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AT BE NL |
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Date of publication of application: |
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12.11.1997 Bulletin 1997/46 |
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Proprietor: Littlefuse, Inc. |
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Des Plaines, IL 60016 (US) |
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Inventor: |
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- Ravindranathan, Palaniappan
75116 Paris (FR)
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Representative: Ballot, Paul Denis Jacques et al |
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Cabinet Ballot-Schmit,
7, rue Le Sueur 75116 Paris 75116 Paris (FR) |
| (56) |
References cited: :
EP-A- 0 716 429 GB-A- 2 100 246
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GB-A- 2 044 531 US-A- 5 115 221
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- PATENT ABSTRACTS OF JAPAN vol. 016, no. 303 (E-1228), 3 July 1992 & JP 04 083302 A
(TOSHIBA CORP), 17 March 1992,
- PATENT ABSTRACTS OF JAPAN vol. 015, no. 343 (E-1106), 30 August 1991 & JP 03 131004
A (TOSHIBA CORP), 4 June 1991,
- PATENT ABSTRACTS OF JAPAN vol. 014, no. 016 (E-872), 12 January 1989 & JP 01 259506
A (ROHM CO LTD), 17 October 1989,
- PATENT ABSTRACTS OF JAPAN vol. 017, no. 514 (E-1433), 16 September 1993 & JP 05 136012
A (ROHM CO LTD), 1 June 1993,
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| Note: Within nine months from the publication of the mention of the grant of the European
patent, any person may give notice to the European Patent Office of opposition to
the European patent
granted. Notice of opposition shall be filed in a written reasoned statement. It shall
not be deemed to
have been filed until the opposition fee has been paid. (Art. 99(1) European Patent
Convention).
|
[0001] The present invention relates to nonlinear resistive devices, such as varistors,
and more particularly to methods of making such devices using barrel plating techniques
in which only the electrically contactable end terminals of the device are plated.
[0002] Nonlinear resistive devices are disclosed in the specifications of U.S. Patent No.
5,115,221.
[0003] Figure 1 is a typical device 10 that includes plural layers 12 of semiconductor material
with electrically conductive electrodes 14 between adjacent layers. A portion of each
electrode 14 is exposed in a terminal region 16 so that electrical contact may be
made therewith. The electrodes 14 may be exposed at one or both of opposing terminal
regions, and typically the electrodes are exposed at alternating terminal regions
16 as illustrated. The exposed portions of the electrodes 14 are contacted by electrically
conductive end terminals 18 that cover the terminal regions 16.
[0004] The apparently simple structure of such devices belies their manufacturing complexity.
For example, the attachment of the end terminals 18 has proved to be a problem in
search of a solution. The terminal regions may be plated with nickel and tin-lead
metals to increase solderability and decrease solder leaching. One method of affixing
the end terminals 18 is to use a conventional barrel plating method in which the entire
device is immersed in a plating solution. However, the stacked layers are semiconductor
material, such as zinc oxide, that may be conductive during the plating process so
that the plating adheres to the entire surface of the device. Thus, in order to provide
separate end terminals as shown in Figure 1, a portion of the plating must be removed
after immersion, or covered before immersion with a temporary plating resist comprised
of an organic substance insoluble to the plating solution. However, the removal of
the plating or organic plating resist is an extra step in the manufacturing process,
and may involve the use of toxic materials that further complicate the manufacturing
process.
[0005] It has also been suggested that the metal forming the end terminals 18 be flame sprayed
onto the device, with the other portions of the surface of the device being masked.
Flame spraying is not suitable for many manufacturing processes because it is slow
and includes the creation of a special mask, with the additional steps attendant therewith,
as disclosed in the specification of U.S. Patent No. 4,316,171.
[0006] An object of the present invention is to provide a method and device that obviates
the problems of the prior art, and in which an electrically insulating, inorganic
layer is formed on portions of the device before the device is barrel plated.
[0007] Another object is to provide a method and device in which a phosphoric acid is reacted
with the exposed surface of stacked zinc oxide semiconductor layers to form a zinc
phosphate coating, and in which a zinc phosphate coating protects portions of the
device that are not to be plated when the end terminals are formed.
[0008] A further object is to provide a method and nonlinear resistive device having a body
of layers of semiconductor material with an electrode between adjacent layers, in
which the body of the nonlinear resistive device is coated with an inorganic layer
that is electrically insulating, except at a terminal region of the body where an
electrode is exposed for connection to an end terminal, and in which the coated body
is plated with an electrically conductive metal to form the end terminal in a process
in which the body becomes electrically conductive and in which the electrically conductive
metal does not plate the coated portions of the body because the inorganic layer is
not electrically conductive.
[0009] The invention is defined in claims 1 and 6.
[0010] The invention will now be described, by way of example, with reference to the accompanying
drawings in which:
[0011] Figure 1 is a pictorial depiction of a varistor typical of the prior art.
[0012] Figure 2 is vertical cross section of an embodiment of the device of the present
invention.
[0013] Figure 3 is a pictorial depiction of a high energy disc varistor with an insulating
layer of the present invention thereon.
[0014] Figure 4 is a pictorial depiction of a surface mount device with an insulating layer
of the present invention.
[0015] Figure 2 illustrates an embodiment of a nonlinear resistive element 20 that includes
a body 22 having stacked zinc oxide semiconductor layers 24 with planar electrodes
26 between adjacent pairs of layers 24. Each electrode 26 has a contactable portion
28 that is exposed for electrical connection to electrically conductive metal (preferably
silver, silver-platinum, or silver-palladium) end terminations 30 that cover terminal
regions 32 of the body 22 and contact the electrodes 26. The portions of body 22 not
covered with the end terminations 30 are coated with an electrically insulative zinc
phosphate layer 34. The end terminations 30 may be plated with layers 36 of electrically
conductive metal that form electrically contactable end portions for the resistive
element 20. By way of example, in one embodiment the zinc oxide layers 24 may have
the following composition in mole percent: 94-98% zinc oxide and 2-6% of one or more
of the following additives; bismuth oxide, cobalt oxide, manganese oxide, nickel oxide,
antimony oxide, boric oxide, chromium oxide, silicon oxide, aluminum nitrate, and
other equivalents.
[0016] The body 22 and end terminations 30 are provided conventionally. The zinc phosphate
layer 34 may be formed by reacting phosphoric acid with the zinc oxide semiconductor
layers exposed at the exterior of the body 22. The reaction may take place for 25-35
minutes at 70° to 80°C. By way of example, one part orthophosphoric acid (85 wt%)
may be added to fifty parts deionized water. The solution may be heated to 75°C and
stirred. The body 22 with end terminations 30 affixed may be washed with acetone and
dried at 100°C for ten minutes. The washed device may be submerged in the phosphoric
acid solution at 75°C for thirty minutes to provide the layer 34. After the layer
34 is applied, the body may be cleaned with hot, deionized water and dried at about
100°C for about fifteen minutes. The layer 34 does not adhere to the end terminations
30 because the silver or silver-platinum in the end terminations 30 is not affected
by the phosphoric acid. The phosphoric acid solution may also be applied by spraying,
instead of submerging, the washed device.
[0017] After the zinc phosphate layer 34 has been applied, the device may be barrel plated
with an electrically conductive metal, such as nickel and tin-lead, to provide the
layers 36. A conventional barrel plating process may be used, although the pH of the
plating solution is desirably kept between about 4.0 and 6.0. In the barrel plating
process the device is made electrically conductive and the plating material adheres
to the electrically charged portions of the device. The metal plating of layers 36
does not plate the zinc phosphate layer 34 during the barrel plating because the zinc
phosphate is not electrically conductive.
[0018] The zinc phosphate layer 34 is electrically insulating and may be retained in the
final product to provide additional protection. The layer 34 does not effect the I-V
characteristics of the device.
[0019] In an alternative embodiment, instead of zinc oxide, the semiconductor may be iron
oxide, a ferrite.
[0020] In another alternative embodiment, the method described above may be used in the
manufacture of other types of electronic devices. For example, a high energy disc
varistor has a glass or polymer insulating layer on its sides. With reference to Figure
3, instead of glass or polymer, the disc varistor 40 may have an insulating layer
42 of phosphate formed in the manner discussed above. The present invention is applicable
to other varistor products such as a surface mount device depicted in Figure 4, radial
parts, arrays, connector pins, discoidal construction, etc.
1. A method of making a nonlinear resistive device (20) comprising the steps of :
(a) providing a body (22) for the nonlinear resistive device (20), the exterior of
the body being a zinc oxide semiconductor (24) except at a terminal region (32) where
an end termination (30) is provided ;
(b) reacting a phosphoric acid with the body (20) to form an electrically insulative
zinc phosphate coating (34) on the exposed zinc oxide semiconductor, the end termination
(32) not being coated with the zinc phosphate ; and
(c) barrel plating the body (22) to plate the end termination (30) with an electrically
conductive metal (36),
wherein the electrically conductive metal (36) does not form on the zinc phosphate
coated portions of the body during the barrel plating because the zinc phosphate is
not electrically conductive.
2. A method as claimed in claim 1 wherein the end termination (30) comprises a layer
of a metal selected from the group consisting of silver, silver-platinum, and silver-palladium.
3. A method as claimed in claim 1 or 2 wherein the body (22) comprises in mole percent,
94-98 % zinc oxide and 2-6 % of one or more of the additives selected from the group
of additives consisting of bismuth oxide, cobalt oxide, manganese oxide, nickel oxide,
antimony oxide, boric oxide, chromium oxide, silicon oxide, and aluminum nitrate.
4. A method as claimed in any one of claims 1 to 3 wherein the step of reacting phosphoric
acid comprises the step of submerging the body (22) in the phosphoric acid, with the
step of submerging the body comprising the step of submerging the body in a orthophosphoric
acid solution for 25 to 35 minutes at 70° to 80°C.
5. A method as claimed in any one of claims 1 to 4 wherein the electrically conductive
metal (36) comprises at least one of nickel and tin-lead, and the body (22) is a varistor.
6. A method of providing a semiconductor device including an inorganic electrically insulative
layer, the semiconductor device having an exposed semiconductor surface (24) and electrically
conductive metal end terminations (28), the method comprising the steps of :
(a) exposing the semiconductor device to a phosphoric acid solution to form a phosphate
coating on the exposed semiconductor surfaces, and not on the end terminations (30)
; and
(b) barrel plating the semiconductor device with an electrically conductive metal
plating in a process in which the device is electrically charged and submerged in
a plating solution, the plating being formed on the end terminations (30) and not
on the phosphate coating because the phosphate coating is not electrically conductive.
7. A method as claimed in claim 6 wherein the exposed semiconductor surfaces comprise
one of zinc oxide and iron oxide.
8. A method as claimed in claims 6 or 7 wherein the phosphoric acid solution comprises
orthophosphoric acid and deionized water.
9. A method as claimed in any claims 6 to 8 wherein the uncoated semiconductor device
is submerged in a phosphoric acid solution for 25 to 35 minutes at 70°C to 80°C to
form an electrically insulative zinc phosphate coating on the exposed surface of the
zinc oxide layers (24), the end terminations (30) not being coated with the zinc phosphate
coating.
1. Verfahren zum Herstellen eines nichtlinearen Widerstandsbauteils (20), das folgende
Schritte aufweist:
a) Vorsehen eines Körpers (22) für das nichtlineare Widerstandsbauteil (20), wobei
das Äußere des Körpers ein Zinkoxid-Halbleiter (24) ausgenommen an einer Anschlußregion
(32) ist, an der ein Kontaktanschluß (30) vorgesehen ist;
b) Durchführen einer Reaktion von Phosphorsäure mit dem Körper (20), um einen elektrisch
isolierenden Zinkphosphat-Überzug (34) auf dem freigelegten Zinkoxid-Halbleiter zu
bilden, wobei der Kontaktanschluß (30) nicht mit dem Zinkphosphat beschichtet wird;
und
c) Durchführen eines Trommelplattierens des Körpers (22), um auf den Anschluß (30)
ein elektrisch leitfähiges Metall (36) abzuscheiden, wobei das elektrisch leitfähige
Metall (36) während des Trommelplattierens nicht die mit Zinkphosphat beschichteten
Abschnitte des Körpers beschichtet, weil das Zinkphosphat nicht elektrisch leitfähig
ist.
2. Verfahren nach Anspruch 1, bei dem der Kontaktanschluß (30) eine Schicht eines Metalls
aufweist, das aus der Gruppe Silber, Silber-Platin und Silber-Palladium ausgewählt
ist.
3. Verfahren nach Anspruch 1 oder 2, bei dem der Körper (22) 94 bis 98 Mol% Zinkoxid
und 2 bis 6 Mol% von einem oder mehreren Zusätzen aufweist, die aus der Gruppe der
Zusätze Wismutoxid, Kobaltoxid, Manganoxid, Nickeloxid, Antimonoxid, Boroxid, Chromoxid,
Siliziumoxid und Aluminiumnitrat ausgewählt sind
4. Verfahren nach einem der Ansprüche 1 bis 3, bei dem der Schritt des Durchführens einer
Reaktion von Phosphorsäure den Schritt des Tauchens des Körpers (22) in die Phosphorsäure
aufweist, wobei der Schritt des Tauchens des Körpers das Tauchen in eine Ortho-Phosphorsäurelösung
für 25 bis 35 Minuten bei 70 bis 80° C umfaßt.
5. Verfahren nach einem der Ansprüche 1 bis 4, bei dem das elektrisch leitfähige Metall
(36) mindestens einen der Stoffe Nickel und Zinn-Blei umfaßt und der Körper (22) ein
Varistor ist.
6. Verfahren zum Vorsehen eines Halbleiterbauteils mit einer anorganischen elektrisch
isolierenden Schicht, wobei das Halbleiterbauteil eine freigelegte Halbleiteroberfläche
(24) und elektrisch leitfähige Metallkontaktanschlüsse (28) aufweist, wobei das Verfahren
die Schritte umfaßt:
a) Exponieren des Halbleiterbauteils einer Phosphorsäurelösung, um eine Phosphatbeschichtung
auf den ausgesetzten Halbleiteroberflächen, aber nicht auf den Kontaktanschlüssen
(30) zu bilden; und
b) Trommelplattieren des Halbleiterbauteils mit einem elektrisch leitfähigen Metall,
das'in einem Prozeß abgeschieden wird, mittels dem das Bauteil elektrisch geladen
und in eine Galvanisierlösung getaucht ist, wobei die Plattierung auf den Kontaktanschlüssen
(30) und nicht auf der Phosphatbeschichtung gebildet wird, weil die Phosphatbeschichtung
nicht elektrisch leitfähig ist.
7. Verfahren nach Anspruch 6, bei dem die exponierten Halbleiteroberflächen entweder
Zinkoxid oder Eisenoxid aufweisen.
8. Verfahren nach Anspruch 6 oder 7, bei dem die Phosphorsäurelösung Ortho-Phosphorsäure
und deionisiertes Wasser umfaßt.
9. Verfahren nach einem der Ansprüche 6 bis 8, bei dem das nicht beschichtete Halbleiterbauteil
in eine Phosphorsäurelösung für 25 bis 35 Minuten bei 70 bis 80° C getaucht wird,
um eine elektrisch isolierende Zinkphosphatschicht auf der exponierten Oberfläche
der Zinkoxidschichten (24) zu bilden, wobei die Kontaktanschlüsse (30) nicht mit der
Zinkphosphatschicht überzogen werden.
1. Procédé de fabrication d'un dispositif à résistance non linéaire (20) comprenant les
étapes consistant à :
(a) fournir un corps (22) destiné au dispositif a résistance non linéaire (20), l'extérieur
du corps étant un semi-conducteur d'oxyde de zinc (24), sauf au niveau d'une zone
d'extrémité (32) où une terminaison d'extrémité (30) est prévue ;
(b) faire réagir un acide phosphorique avec le corps (20) pour former un dépôt de
phosphate de zinc, électriquement isolant (34), sur le semi-conducteur d'oxyde de
zinc exposé, la terminaison d'extrémité (32) n'étant pas revôtue du phosphate de zinc
; et
(c) métalliser au tambour le corps (22) pour métalliser la terminaison d'extrémité
(30) avec un métal conducteur électriquement (36),
dans lequel le métal électriquement conducteur (36) ne se forme pas sur les parties
du corps recouvertes de phosphate de zinc pendant la métallisation au tambour parce
que le phosphate de zinc n'est pas électriquement conducteur.
2. Procédé selon la revendication 1 dans lequel la terminaison d'extrémité (30) comprend
une couche d'un métal sélectionné dans le groupe constitué d'argent, d'argent-platine,
et d'argent-palladium.
3. Procédé selon la revendication 1 ou 2, dans lequel le corps (22) comprend en pourcentage
molaire, 94 à 98 % d'oxyde de zinc et 2 à 6 % de l'un ou de plusieurs des additifs
sélectionnés dans le groupe d'additifs constitué d'oxyde de bismuth, d'oxyde de cobalt,
d'oxyde de manganèse, d'oxyde de nickel, d'oxyde d'antimoine, d'oxyde borique, d'oxyde
de chrome, d'oxyde de silicium et de nitrate d'aluminium.
4. Procédé selon l'une quelconque des revendications 1 à 3 dans lequel l'étape consistant
à faire réagir de l'acide phosphorique comprend l'étape consistant à immerger le corps
(22) dans l'acide phosphorique, l'étape d'immersion du corps comprenant l'étape consistant
à immerger le corps dans une solution d'acide orthophosphorique pendant 25 à 35 minutes
à une température de 70° à 80° C.
5. Procédé selon l'une quelconque des revendications 1 à 4 dans lequel le métal électriquement
conducteur (36) comprend au moins l'un des métaux nickel et étain-plomb et dans lequel
le corps (22) est un varistor.
6. Procédé consistant à fournir un dispositif à semi-conducteur comprenant une couche
inorganique isolante électriquement, le dispositif à semi-conducteur comportant une
surface semi-conductrice exposée (24) et des terminaisons d'extrémité métalliques
conductrices électriquement (28), le procédé comprenant les étapes consistant à :
(a) exposer le dispositif à semi-conducteur à une solution d'acide phosphorique pour
former un dépôt de phosphate sur les surfaces semi-conductrices exposées et non sur
les terminaisons d'extrémité (30) ; et
(b) métalliser au tambour le dispositif à semi-conducteur avec un placage métallique
électriquement conducteur selon un processus dans lequel le dispositif est chargé
électriquement et immergé dans une solution de métallisation, le placage étant formé
sur les terminaisons d'extrémité (30) et non sur le dépôt de phosphate parce que le
dépôt de phosphate n'est pas conducteur électriquement.
7. Procédé selon la revendication 6 dans lequel les surfaces semi-conductrices exposées
comprennent, soit de l'oxyde de zinc, soit de l'oxyde de fer.
8. Procédé selon les revendications 6 ou 7 dans lequel la solution d'acide phosphorique
comprend de l'acide orthophosphorique et de l'eau désionisée.
9. Procédé selon l'une quelconque des revendications 6 à 8 dans lequel le dispositif
à semi-conducteur non recouvert est immergé dans une solution d'acide phosphorique
pendant 25 à 35 minutes, à une température comprise entre 70° C et 80° C pour former
un dépôt de phosphate de zinc, électriquement isolant, sur la surface exposée des
couches d'oxyde de zinc (24), les terminaisons d'extrémité (30) n'étant pas recouvertes
du dépôt de phosphate de zinc.
