(19)
(11) EP 0 811 499 A3

(12) EUROPEAN PATENT APPLICATION

(88) Date of publication A3:
16.06.1999 Bulletin 1999/24

(43) Date of publication A2:
10.12.1997 Bulletin 1997/50

(21) Application number: 97109234.1

(22) Date of filing: 06.06.1997
(51) International Patent Classification (IPC)6: B41J 2/16
(84) Designated Contracting States:
AT BE CH DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

(30) Priority: 07.06.1996 JP 168332/96

(71) Applicant: CANON KABUSHIKI KAISHA
Tokyo (JP)

(72) Inventor:
  • Nishiwaki, Masayuki
    Ohta-ku, Tokyo (JP)

(74) Representative: Pellmann, Hans-Bernd, Dipl.-Ing. et al
Patentanwaltsbüro Tiedtke-Bühling-Kinne & Partner Bavariaring 4
80336 München
80336 München (DE)

   


(54) Method of manufacturing nozzle member, and work apparatus


(57) The invention relates to a method of manufacturing a nozzle member, having the step of splitting light from a light source by amplitude splitting to form a plurality of illumination beams, and the step of illuminating a plurality of mask patterns formed on a mask with the corresponding split illumination beams so as to expose a workpiece via the mask patterns, and a work apparatus using the method.






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