(19)

(11)

EP 0 812 477 A1

(12)

(43) Date of publication: 17.12.1997 Bulletin 1997/51 (21) Application number: 96908627.0 (22) Date of filing: 27.02.1996

(51) International Patent Classification (IPC):  H01L 21/ 302( . ) H01L 21/ 311( . ) H01L 21/ 768( . ) H01L 21/ 203( . ) H01L 21/ 312( . ) H01L 23/ 522( . ) (86) International application number: PCT/US1996/002920 (87) International publication number: WO 1996/027212 (06.09.1996 Gazette 1996/40)

(84) Designated Contracting States: BE DE ES FR GB IT SE (30) Priority: 28.02.1995 IL 19950112826 (71) Applicant: Chip Express Corporation Santa Clara, CA 95054 (US)	(72) Inventors: JANAI, Meir 34861 Haifa (IL) CASSUTO, Yoram 34749 Haifa (IL) SILVERSTEIN, Michael, Stephen 32984 Haifa (IL) ZEHAVI, Sharone Sunnyvale California 94087 (US) (74) Representative: Weisert, Annekäte, Dipl.-Ing. Dr.-Ing., et al  Patentanwälte Kraus Weisert & Partner Thomas-Wimmer-Ring 15 80539 München 80539 München (DE)