MECHANICAL RESONANCE, SILICON ACCELEROMETER - Patent 0815453

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EP 0 815 453 A1

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(43)	Date of publication:
	07.01.1998 Bulletin 1998/02

(21)	Application number: 95912856.0

(22)	Date of filing: 13.03.1995

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International Patent Classification (IPC):

G01P 15/ 097^{( . )}

G01P 15/ 10^{( . )}

(86)	International application number:
	PCT/US1995/003011

(87)	International publication number:
	WO 1996/028735 (19.09.1996 Gazette 1996/42)

(84)	Designated Contracting States:
	DE FR GB

(71)	Applicant: HONEYWELL INC.
	Minneapolis Minnesota 55408 (US)

(72)	Inventors:
	BURNS, David, W. Minneapolis, MN 55419 (US) FRISCHE, Richard, H. Phoenix, AZ 85022 (US)

(74)	Representative: Herzbach, Dieter, Dipl.-Ing.
	Honeywell Holding AG Patent- und Lizenzabteilung Postfach 10 08 65 63008 Offenbach 63008 Offenbach (DE)

(54)	MECHANICAL RESONANCE, SILICON ACCELEROMETER