......DE....FRGB....................................................................................*EPregister to ST.36 EBD process v 1.0 kbaumeister@epo.org (15 Jan 2013)0815453A119980107EP95912856.01995031319971006enenen1998010719980219980107199802G01P 15/ 097 A I G01P 15/ 10 A I enMECHANICAL RESONANCE, SILICON ACCELEROMETERfrACCELEROMETRE AU SILICIUM A RESONANCE MECANIQUEdeMECHANISCHER RESONANZ-BESCHLEUNIGUNGSMESSER AUS SILIZIUMHONEYWELL INC.Honeywell PlazaMinneapolis Minnesota 55408USBURNS, David, W.5537 First Avenue SouthMinneapolis, MN 55419USFRISCHE, Richard, H.531 East Canterbury DrivePhoenix, AZ 85022USHerzbach, Dieter, Dipl.-Ing.Honeywell Holding AG Patent- und Lizenzabteilung Postfach 10 08 6563008 OffenbachDEDEFRGBUS199500301119950313enWO199602873519960919199642